Joint International Symposium on System-Integrated Intelligence 2012: New Challenges for Product and Production Engineering Laser Thin Film Patterning of Embedded Strain Sensors on Non-Planar Surfaces

نویسندگان

  • J. F. Duesing
  • O. Suttmann
  • J. Koch
  • U. Stute
  • L. Overmeyer
چکیده

Strain sensors build up directly on machine components by thin film techniques enable measurement of forces, strain and pressure even in harsh environments. Up to day, the application of thin film sensors is restricted to planar surfaces due to limitations in standard patterning techniques. We present an alternative patterning method based on laser thin film ablation. During laser processing of complex 3-D surfaces, the incidence angle of the laser beam changes with the topography of the component. In this work, the influence of varying incidence angle on the patterning process is discussed and the feasibility of the laser patterning process is demonstrated on tension specimen with integrated thin film sensors in v-shaped notches. The presented technology may enable new applications for miniaturized strain sensors on complex shaped components of machine tools for process monitoring purposes.

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تاریخ انتشار 2012